Mask related
A Pellicle Inspection and Pellicle Mounting System for LI712
71PA/71PP
| Automatic processing from particle inspection to mounting of pellicle by in-line connection of 71PA/71PP and LI712 |
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Applications
- Automatic transportation and mounting of pellicle in the manufacturing process of large size photomasks.
- Inspection of particles on pellicle by reflective scattering light (Quality confirmation inspection of pellicle)
Features
- This one system implements the whole process from inspection, tentative mounting through final mounting of a pellicle.
- In-line connection with LI712 drastically reduces particle contamination of both masks and pellicles.
- Installation of ionizers keeps clean environment by guarding against particle sticking and avoids productivity deterioration caused by re-mounting of pellicles.
- Jigs for clamping a pellicle are stocked in arrangement by their sizes in a stocker and this system is compatible with pellicles of various sizes, accordingly.
- Exfoliate paper can be peeled off automatically without giving excess stress by detecting tensile stress at a clamp when a pellicle is taken out of a carrying case of masks by a clamp.
- In the pellicle mounting process, alignment procedure is available based on the measurement of distance between the mask edge and the pellicle edge by CCD cameras set at 4 places.
- Automatic inspection of particles on pellicle, a review function, a particle-elimination function by air blow and a front-side / back-side inverting function implement high operability.
- Because detected defects can be observed either in bright field or in dark field, and image data of particles can be stored, this tool is effective not only for good/no good verification but also for quality control and defect analysis.
- After tentatively mounting pellicle on a mask, the mask is transferred to the final mounting tool. The final mounting tool is equipped with adsorption pads that work by air pressure bonding and are placed at a regular interval, and accordingly, the final pellicle mounting is performed with uniformity due to application of constant pressure and time for pressure bonding.
Specifications
| Pellicle size | Full size for G10 |
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| Inspection speed | ≒40 mm/sec |
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| Inspection width | ＝60 mm |
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| Scattering light detector | Optical fiber coupling PMT*
* Optical fiber coupling photo multiplier tube
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| Detectable particle size | ≒5 μm |
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| Inspection area | Pellicle inner surface beyond 5 mm inside the pellicle frame |
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| Outer dimensions (mm) | 5800(W)×3900(D)×3800(H)
Dimension may differ depending on specification
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| Weight (kg) | About 2500 |
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Configuration
Main body, Control rack, PC desk
