Visualization of PV Cell Conversion Efficiency Distribution
Contributes to yield improvement of large size mask production by detecting overlooked defects
Inspection of large size masks for G10 with high speed and high sensitivity
Automatic processing from particle inspection to mounting of pellicle by in-line connection of 71PA/71PP and LI712
High speed inspection of large size Photomask with sub-micron sensitivity
Automatic processing of pellicles from particle inspection to mounting on masks under inline interlinking with 51MD
High quality repair of microscopic defects in large size mask
High quality and high sensitivity inspection respond to the diversification andfiner patterns of the Middle/Large Photomasks
Customer can freely select the system that is most suitable to customer's own inspection line.
A new standard for repair of LCD Color Filter;Ten plus several seconds for one repair,Cost reduced to 1/5
Mounting of repair function with the film thermal transfer method
Automatic repair of Tokki defect
Automatically inspects all kinds of typical defects
