Please feel free to contact us by sending us a request from below or by calling us at the phone number on the right.
Transparent Object Inspection System WASAVI Series TROIS33
High sensitivity defect inspection/review system that inspects GaN on Si and transparent wafers with high speed
- Basic Information
Features
- Confocal optics optimized for transparent wafers enables TROIS33 to perform inspections reliably without interference of reflected light from the back surface.
- Differential interference optics provides high sensitivity detection of various crystal defects including shallow scratch.
- With the use of a wavelength selection function based on a broadband light source and optical filters that eliminate effects of film interference, TROIS33 can perform inspections under optimal conditions for each wafer and film.
- Our proprietary algorithm eliminates influence of surface morphology not originating from defects.
- Furnished with a defect mapping function, a defect classification function and a marking function, TROIS33 supports defect analyses.
Applications
- Inspection of defects on wide-bandgap semiconductors, sapphires, quartz and other transparent wafers
- Inspection of defects on homo/hetero-epitaxial layers of wide-bandgap semiconductors
- Epitaxial growth process management and equipment management
- Development of polishing materials and management of polishing process
- Inspection of pattern defects on transparent wafers
Specifications
| External dimensions | 2,200mm(W) x 1,850mm(D) x 2,000mm(H) (for the type of 6 inch specification) ※Including Main body, Rack and Operation desk |
|---|---|
| Applicable wafer size | Maximum φ8 inch |
| Applicable wafer type | GaN and various transparent wafers |
| Inspection time | 10 minutes per wafer (with φ6 inch wafer and 10x lens) |
- Basic Information
Please feel free to contact us by sending us a request from below or by calling us at the phone number on the right.
Integration of 5 functions in a single microscope
High-speed warpage/Stress inspection for patterned wafers
An optimum system for outgoing/incoming inspections and process monitoring at SiC wafer mass production lines
