LCD Inspection and Repair System

Large Size Photomask Inspection SystemCLIOS G821

High sensitivity inspection of large-size photomasks with advanced patterns for high-definition LCDs

Large Mask Inspection SystemLI Series LI712

Inspection of large size masks for G10 with high speed and high sensitivity

Pellicle Inspection and Pellicle Mounting System for LI71271PA/71PP

Automatic processing from particle inspection to mounting of pellicle by in-line connection of 71PA/71PP and LI712

Pellicle Inspection and Pellicle Mounting System for 51MD51PA

Automatic processing of pellicles from particle inspection to mounting on masks under inline interlinking with Large Size Photomask Inspection System

Large Size Photomask Substrates/Blanks Inspection SystemLB79

Contributes to yield improvement of large size mask production by detecting overlooked defects

Middle/Large Photomask Inspection SystemsLI Series LI34/LI44

High quality and high sensitivity inspection respond to the diversification and finer patterns of the Middle/Large Photomasks