Bottom Anti-Reflective Coat
An additional coating between the substrate and the resist to suppress the interference with the reflected light by the substrate.
BIM
Binary Intensity Mask
General term for Photomasks that are not the Phase Shift Masks.
In general, chromium film is used as the light shielding layer on a glass substrate.
Boron
An element with atomic number of 5. Atomic symbol is B (Boron)
