The current that flows under the dark condition
A state that an imaging plane of optics is out of alignment in the direction of optical axis. This is the so-called defocusing state.
A process in which unnecessary part of resist is removed and necessary part of resist is kept to remain after exposing the photo sensitive resist.
Semiconductor device is a solid and active device utilizing electronic characteristics, mainly electronic conductivity, of semiconductor, and actual semiconductor devices are discrete transistors, IC's and such.
Cutting out chip size pieces out of wafer using a thin blade.
Recently, laser is sometimes used instead of blades.
Die to Database
A method to detect defects by comparing chip (die) and design data of patterns.
Die to Die
A method to detect defects by comparing adjacent chip (die) to chip (die).
Depth Of Focus
The spatial range in optical direction in which vivid image is obtained when sample surface is observed by a microscope.
The focal depth of confocal microscope is characterized by its shallowness being about 0.3um when NA is 0.95.
The confocal microscope realizes high precision depth (or height) measurement utilizing this shallowness of the focal depth.
Impurity or dopant
Injection volume of electrons and ions per unit area
Abbreviation for Deep Ultraviolet. DUV represents lights with wavelengths below about 200 nanometers.
Dye Sensitized Solar Cell(DSSC)
A Solar Cell that consists of dye that absorbs light and electrolyte through which ion is transported.