Semiconductor device is a solid and active device utilizing electronic characteristics, mainly electronic conductivity, of semiconductor, and actual semiconductor devices are discrete transistors, IC's and such.
Dicing
Cutting out chip size pieces out of wafer using a thin blade.
Recently, laser is sometimes used instead of blades.
Die to Database
A method to detect defects by comparing chip (die) and design data of patterns.
Die to Die
A method to detect defects by comparing adjacent chip (die) to chip (die).
DOF
Depth Of Focus
The spatial range in optical direction in which vivid image is obtained when sample surface is observed by a microscope.
The focal depth of confocal microscope is characterized by its shallowness being about 0.3um when NA is 0.95.
The confocal microscope realizes high precision depth (or height) measurement utilizing this shallowness of the focal depth.
Dopant
Impurity or dopant
DUV
Deep Ultraviolet
Light source
Ultraviolet light whose wavelength is in the range of 190-260nm
