Embedded Attenuated Phase Shift Mask
Attenuated Phase Shift Mask
Alias name for half tone type phase shift mask.
EB
Electron Beam
Lithography (exposure) tool for circuit patterns using electron beam.
EPL
Electron Projection Lithography
One type of lithography that uses electron beam projection system
Etching
One process method.
By using chemicals or gases, such as acids or alkalis, removal of materials is performed.
This process enables removal of materials of unnecessary part.
