PRODUCTS
Glossary
A B C D E F G H I J K L M
N O P Q R S T U V W X Y Z
F
F2
FOSB
FOUP
FPD
F2
Fluorine
F2 laser used as an exposure light source
Laser wavelength: 157nm
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FOSB
Front Opening Shipping Box
Shipping case for wafers
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FOUP
Front Opening Unified Pod
Storage case for Photomask and wafer
http://www.asyst.co.jp/index.html
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FPD
Flat Panel Display
Collective term for a large display such as LCD and PDP
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