Glossary

Fill Factor (FF)

Fill factor (FF) is expressed by FF=Pmax/Isc×Voc. When Rs value is high or Rsh value is low, this parameter value drops and the efficiency of the Solar cell drops consequently.

Foreign Particle

Objects, other than patterns, adhered on substrates and pellicles. Objects consist of haze, floating dust, oil-mist and so on.

FOSB

Front Opening Shipping Box
Shipping case for wafers

FOUP

Front Opening Unified Pod
Storage case for Photomask and wafer
http://www.asyst.co.jp/index.html

FPD

Flat Panel Display
Collective term for a large display such as LCD and PDP

Fullerene

Materials that consist only of carbon atoms with πelectrons and have stereoscopic structures such as spherical form