i line
One of the mercury spectra
Light wavelength: 365nm
IC
Electronic circuit with variety of functions by integrating and forming transistors, resistors, condensers, diodes and such on a single substrate.
Immersion
An optical method to realize higher resolution by immersing liquid between the objective lens and the sample to make refractive index higher than 1.0. (Immersion exposure)
Ingot
A block of Silicon that is the original material for Silicon Wafer. The block is made of Si single crystal grown from Si melt. Silicon Wafer is made by polishing a thin slice cut out of the ingot.
Ion
Ion is an atom or a molecule that possesses electric charge by giving or receiving electrons. Ion exists in plasma in ionosphere, electrolytic solution, materials having ionic bonding such as ionic crystal and such.
ITO
Indium Tin Oxide
Transparent electrode that is widely used for electrically driving each pixel in a liquid crystal panel.
