Glossary

I line

i line
One of the mercury spectra
Light wavelength: 365nm

Immersion

An optical method to realize higher resolution by immersing liquid between the objective lens and the sample to make refractive index higher than 1.0. (Immersion exposure)

Implementation

To embed or install new functions, specifications, parts and such on hardware and software. It also means methods for embedding or installing such functions.

Infrared Light

Electromagnetic wave of certain wavelengths that is longer than that of red region (700 nm -) and shorter than that of radio wave.

Ingot

A block of Silicon that is the original material for Silicon Wafer. The block is made of Si single crystal grown from Si melt. Silicon Wafer is made by polishing a thin slice cut out of the ingot.

Internal Quantum Efficiency (IQE)

For a photo sensitive device, IQE is a ratio of number of carriers generated against number of photons absorbed by the unit.

Ion

Ion is an atom or a molecule that possesses electric charge by giving or receiving electrons. Ion exists in plasma in ionosphere, electrolytic solution, materials having ionic bonding such as ionic crystal and such.

Isc

Jsc represents short-circuit current

ITO

Indium Tin Oxide
Transparent electrode that is widely used for electrically driving each pixel in a liquid crystal panel.

ITRS

International Technology Roadmap for Semiconductors
http://public.itrs.net/

I-V Curve

A graph with horizontal axis representing voltage and vertical axis representing current and various parameters of Solar cells can be derived from the configuration of the graph.