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Glossary
A B C D E F G H I J K L M
N O P Q R S T U V W X Y Z
A
Aberration
ADC
Aerial Image
AFM
Aligner
Alt-PSM
AOD
APC
ArF
Att-PSM
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B
BARC
BIM
Boron
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C
CAR
Catadioptiric
CCD
CD
Cell Shift
CF
Chip
CMP
Confocal
COP
CPL
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D
Device
Dicing
Die to Database
Die to Die
DOF
Dopant
DUV
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E
EAPSM , Att-PSM
EB
EPL
Etching
EUV
EUVL
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F
F2
FOSB
FOUP
FPD
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G
G line
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H
He-Ne
HT
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I
I line
IC
Immersion
Ingot
Ion
ITO
ITRS
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K
KrF
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L
Laser
LCD
LER
Levenson
Lithography
LSI
LWR
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M
MAGICS
Mask Blanks
Mask Substrate
MDP
MEMS
ML2
Molding
Mounting
μm
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N
N.A.
NGL
NIL
nm
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O
Omnifocal Image
OPC
OPTELICS®
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P
Patch Work
PDP
Pellicle
Phase Shift Angle
Phosphorous
Photo Resist
Photomask
Polishing
PSM
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Q
QZ
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R
Resist
Resolution , Resolving Power
RET
Reticle
RSP
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S
Scanner
Scanning Laser Microscope
SEM
SEMATECH
Semiconductor
Silicon
Single Crystal
SMIF
S/N ratio
SOI
Sputtering
Stepper
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T
TFT
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V
VUV
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W
Wafer
Wire Bonding
Y
Yield
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