PRODUCTS
Glossary
A B C D E F G H I J K L M
N O P Q R S T U V W X Y Z
L
Laser
LCD
LER
Levenson
Lithography
LSI
LWR
Laser
Light Amplification by Stimulated Emission of Radiation
Coherent light source that utilizes amplification of induced radiation from excited atoms or molecules.
It has a higher coherency and a narrower spectrum width than light from a normal lamp.
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LCD
Liquid Crystal Display
A display which uses its light control by liquid crystal.
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LER
Line Edge Roughness
The deviation of a resist pattern edge from its ideal line.
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Levenson
One kind of phase shift Photomask.
A phase shift photomask that generates phase shift by either forming transparent film on a photomask that generates phase shift in transmission light or etching the substrate glass.
A type of photomask in which chromium is used for shielding film and glass etching is used for shifter (the area that generates phase shift) is generally used.
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Lithography
Technology to transfer circuit patterns on wafer and such by using light, electron and others.
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LSI
Large Scale Integrated circuit
An integrated circuit consists of hundreds of thousands of transistors.
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LWR
Line Width Roughness
The deviation of a resist width from its ideal width. It is closely related with LER, but it farther affects the transister performance.
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