An inspection method to detect defects from the information of reflected light obtained by illuminating a wafer. In contrast with the "Micro Inspection" that detects fine defects by using high magnification optics, the inspection method described here is called "Macro Inspection"
Multiple image Acquisition for Giga-bit pattern Inspection with Confocal System
Generic term for Lasertec Blanks Inspection system for wafer or mask
To clean some kind of contamination (fine particles and molecular level contamination materials) that sticks to the mask surface after the mask manufacturing process such as fine processing, Cleaning is also performed to eliminate Haze.
A glass substrate to be used as a material for making photomask
The glass substrate covered with only a light shielding film such as a MoSi layer and the glass substrate covered with a resist film on top of a MoSi layer are both mask blanks.
Glass substrates that are used in manufacturing Mask Blanks.
Typical mask substrates have the size of 152mm square with 6.3mm thickness, and are made with quartz.
Mask Data Preparation
Since recent photomasks require complicated OPC, MDP cost is increasing.
Micro Electro Mechanical Systems
Three dimensional micro electronic and mechanical system (micro system, micro machine)
Microcrystalline silicon in thin-film structure is mainly used for solar cell. This material has intermediate properties between a crystal silicon and an amorphous silicon.
Minority Carrier Diffusion Length
Transportation distance that minority carrier in semiconductor can move forward until annihilation as a result of recombination
A kind of lithographic technology which does not require photomask.
It is mainly referred to a multi e-beam direct writing technologhy aiming to improve throughput.
Inclusion of chips by mold packaging works to protect chips from dust, humidity and such. Resin is usually used as molding materials.
MoSi (Molybdenum Silicide)
One of the materials used for light shielding film on photomasks
Mounting is to mount a chip on substrate.
Multi Junction Solar Cell
Stacking of Solar Cells with different band gaps
Unit of length
One thousandth of 1 millimeter