PRODUCTS
Glossary
A B C D E F G H I J K L M
N O P Q R S T U V W X Y Z
S
Scanner
Scanning Laser Microscope
SEM
SEMATECH
Semiconductor
Silicon
Single Crystal
SMIF
S/N ratio
SOI
Sputtering
Stepper
Scanner
An exposure tool that employs scanning exposure method moving both stages of reticle and wafer.
It is also called step & scan because the wafer stage steps after every scanning exposure.
It is common to reduce the patter of reticle (Photomask) by 1/4 on wafer, and scan inversely to the wafer stage.
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Scanning Laser Microscope
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SEM
Scanning Electron Microscope
A microscope that uses electron beam
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SEMATECH
SEmiconductor MAnufacturing TECHnology
http://www.sematech.org/index.htm
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Semiconductor
Material characterized by its intermediate electrical property which lies between that of “conductor” in which current flows well and that of “insulator” in which current does not flow at all.
Or, electronic circuit made of semiconductor materials.
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Silicon
The element occupying the second highest proportion among all the elements on the globe, following Oxygen which occupies the highest proportion.
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Single Crystal
Crystal is a structure forming space lattice within itself, made of atom or molecule arrayed with a certain periodicity.
When such periodicity is formed all through the crystal, the crystal is called single crystal.
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SMIF
Standard Mechanical InterFace
Storage case for Photomask and wafer
“SMIF” is the registered brand of Assyst Technologies Inc.
http://www.asyst.co.jp/index.html
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S/N ratio
Signal to Noise Ratio
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SOI
Silicon On Insulator
A wafer which has thin Si crystal layer on insulator
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Sputtering
One method of forming a film. Ion within plasma generated by discharge is accelerated to bombard target material and emitted atoms out of the target by ion bombardment are deposited on substrate surface to form a film.
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Stepper
Exposure tool for transferring (exposing) electronic circuit pattern on a photomask to a substrate (Wafer, FPD), and the tool employs step & repeat procedure for the exposing.
Typical reduction ratio of the transferring is 1/5 or 1/4, but there are other reduction ratios.
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