OPTELICS® series

3CCD Real Color Confocal Microscope

OPTELICS® H1200(WIDE)

[3 line CCD's], New Perception to Confocal Microscope

Observation of various types of materials:
MEMS, NEMS, Nanoinprint,Semiconductor, LCD Panel related materials, Metals, Ceramics, Chemical Materials, Polymer Materials, Crystals, Biological Samples, Industrial Materials and so on

Color confocal image of 12 million pixels based on RGB 3CCD devices with 2048x2048 pixels each.
Fastest scan rate of 7.5～120 frames/sec by Variable Frame Rate function
Realization of simple and easy operationality by automatic measurement function by one click (3D, Surface Roughness, etc.)
Plentiful software such as multi layer 3D, shape measurement, roughness measurement, thickness measurement, patch work and so on
Even sample with large contrast difference is observable by a real time, sharp mode
Real time zoom function up to 8 times is equipped.
Function to record and play moving image for as long as 10 hours maximum
Electric revolver and auto focus functions are equipped as standard

Height measurement	Measurement repeatability(σ) 0.02μm
Line width measurement	Measurement repeatability(3σ) 0.01μm

Wave	Wavelength Selection 5 wavelengths Blue: 436 nm, Cyan: 488 nm, Green: 546 nm, Yellow: 577 nm, Red: 630 nm Wavelength most suited to sample can be selected from the above 5 wavelengths.
Interference	Phase shift interference function Vertical measurement resolution of 1 nm based on Mirau interferometer, Measurement time 2 to 3 seconds
DIC	Differential Interference Contrast Observation of nano-scale irregularity on sample surface by Differential Interferometry,
Exceed	AFM Scan range: XY20×20μm, Z2μm or less