| Simplified Model preserving Measurement Accuracy of High Order Model (H1200) |
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Applications
Observation of various types of materials:
MEMS, NEMS, Nanoinprint,Semiconductor, LCD Panel related materials, Metals,
Ceramics, Chemical Materials, Polymer Materials, Crystals, Biological Samples,
Industrial Materials and so on
Features
- Color confocal image of 3 million pixels based on RGB 3CCD devices with 1024x1024 pixels each.
- Fastest scan rate of 7.5～120 frames/sec by Variable Frame Rate function
- Realization of simple and easy operationality by automatic measurement function by one click (3D, Surface Roughness, etc.)
- Plentiful software such as multi layer 3D, shape measurement, roughness measurement, thickness measurement, patch work and so on
- Even sample with large contrast difference is observable by a real time, sharp mode
- Real time zoom function up to 8 times is equipped.
- Electric revolver and auto focus functions as standard equipments
- Objective lenses of X5, X10 and X20 are standard parts
- Auto focus as standard function
- Reduction software for floor vibration effect as standard software
Specification
| Height measurement | Measurement repeatability(σ) 0.02μm |
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| Line width measurement | Measurement repeatability(3σ) 0.01μm |
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OPTION
