Mask related
Large Mask Inspection System
LI712
| Inspection of large size masks for G10 with high speed and high sensitivity |
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Applications
- Inspection of Phtomasks for LCD TFT
Features
- Inspection of masks up to maximum size of 1800 mm x 2000 mm x 22 mm (t)
Capable of Die to Die and Double Eye Simultaneous Die to Database inspection modes
# Implementation of Database inspection speed twice as high as that of the conventional system by installation of double Database - Implementation of high-speed inspection 1.25 as high as that of the conventional system by employment of a new type TDI sensor and parallel image processing circuit
- Implementation of high resolution by employment of a new type TDI sensor and a newly designed high NA objective lens for g-line
- Employment of Database deployment engine compatible with halftone and sub-pixel
- Footprint conservation design by mask setting in vertical direction
- Pellicle mounting function inside the tool (Option)
Specifications
| Inspection surface | Patterned surface of photomask |
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| Mask size (mm) | 300×300～1800×2000×22(t)
(Under adaptor usage)
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| Inspection Sensitivity | 0.35 μm (Objective lens: 20X, Speed: Slow) |
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| Inspection time per unit area | 0.19 sec/ cm2 (Objective lens 10X, Speed: Fast)
(Inspection mode: under Die to Die / Die to Database )
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| Drawing unit of deployment engine | 0.25 μm minimum |
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| Outer dimensions (mm) | 5600(W)×2000(D)×3100(H) |
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| Weight (kg) | About 9000 |
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