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3CCD Real Color Confocal MicroscopeOPTELICS® H1200 (WIDE)
Integration of 5 functions in a single microscope
- Basic Information
Features
- Color confocal image of 12 million pixels based on RGB 3CCD devices with 2048x2048 pixels each.
- Fastest scan rate of 7.5～120 frames/sec by Variable Frame Rate function
- Realization of simple and easy operationality by automatic measurement function by one click (3D, Surface Roughness, etc.)
- Plentiful software such as multi layer 3D, shape measurement, roughness measurement, thickness measurement, patch work and so on
- Even sample with large contrast difference is observable by a real time, sharp mode
- Real time zoom function up to 8 times is equipped.
- Function to record and play moving image for as long as 10 hours maximum
- Electric revolver and auto focus functions are equipped as standard
Applications
- Observation of various types of materials:
MEMS, NEMS, Nanoinprint,Semiconductor, LCD Panel related materials, Metals, Ceramics, Chemical Materials, Polymer Materials, Crystals, Biological Samples, Industrial Materials and so on
Specifications
| Height measurement | Measurement repeatability(σ) 0.01µm |
|---|---|
| Line width measurement | Measurement repeatability(3σ) 0.01µm |
| Wave (OPTION) |
Wavelength Selection 5 wavelengths Blue: 436 nm, Cyan: 488 nm, Green: 546 nm, Yellow: 577 nm, Red: 630 nm Wavelength most suited to sample can be selected from the above 5 wavelengths. |
| Interference (OPTION) |
Phase shift interference function Vertical measurement resolution of 1 nm based on Mirau interferometer, Measurement time 2 to 3 seconds |
| DIC (OPTION) |
Differential Interference Contrast Observation of nano-scale irregularity on sample surface by Differential Interferometry, |
| Exceed (OPTION) |
AFM Scan range: XY20×20µm, Z2µm or less |
- Basic Information
Terms related to this series
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High Sensitivity Defect Inspection/Review System for inspection/analysis specifically of various kinds of transparent wafers
Measure PCB warpage and parts height in 3D with high-speed and
