Color filter related
LCD Color Filter/TFT defect repair system
RL Series
| Automatic repair of Tokki defect |
 |
|
|
Applications
- Defect Repair of Color Filter for LCD
- Observation of defect and various types of measurements such as height measurement of Tokki defects
Features
- Automatic defect repair is possible based on the coordinate information of defects transmitted from defect inspection system.
- Realized minimized footprint and high performance per cost by higher speed and integrated optical path.
- Pinpoint repair of TOKKI defects
- Integration of tape repair and laser repair widens repair function
- High resolution defect observation and height measurement of Tokki defects, with non-contact, high accuracy and high speed, are available based on confocal optics.
- Mounting of high-speed and high precision linear motor stage
Specifications
| Compatible substrate size | Compatible up to 6th generation substrate |
|---|
| Defect repair method | Grinding tape method, Laser repair method |
|---|
