Pursuit of the best image obtainable by color confocal microscope has made high-resolution image of 12 million pixels based on the 3 CCD system come into existence. For the reason that the 3 CCD sensor system is introduced, images of excellent color separation and meticulously high resolution are displayed in real time. Moreover, even when magnification is raised up to 11200 times (on a 20 inch monitor) by the new real time zoom function, samples are observed by clear images with brightness unchanged.

Color filter, though it is laid on the backside of the glass plate, can be clearly observed through the glass plate and shape measurement of each RGB layer can be performed. Measurement data are made into summary with statistics such as maximum, minimum, sum, average, standard deviation, in a sheet form.

For observation and measurement of samples with transparency, the wavelength switching function is quite effective. One vertical scan acquires height measurement data simultaneously for RGB wavelengths and most suitable height data can be selected from each RGB height data. Even those samples difficult to measure surface shape for having transparent surface layer, shape of the outermost layer can be observed and measured by utilizing data by Blue wavelength. Not only that, shape of the lower layer can be selectively observed and measured by utilizing data by Red wavelength.