Lasertec Corporation
OPTELICS® Special Page To have more profound knowledge about Confocal Microscope
Debut of an unprecedented Confocal Microscope OPTELICS® S130 equipped with 5 kinds of illumination wavelengths
Speedy nano-region measurement enabled by Mirau interferometric measurement system
Can freely choose a wavelength out of five kinds of wavelengths matching the nature of samples Bright, beautiful and high-resolution image that satisfies eyes of professionals
High quality color image that vividly reproduces even texture of samples System configuration
2.Bright, beautiful and high-resolution image that satisfies eyes of professionals
Outstandingly high XY measurement accuracy and height measurement accuracy
 XY measurement repeatability 0.02µm (3σ)    Height measurement repeatability 0.03µm (σ)
By ceasing the beam scanning method using a mirror, measurement error originated to accidental error of mirror operation has been fundamentally eliminated. High precision and high stability that are basic performances for a measurement microscope is preserved for a very long time. Also, image acquisition stability in all the X, Y and Z direction has been realized and as a result, higher precision measurement than the conventional microscope has become possible. Furthermore, the well-established line width measurement software provides high precision measurement output with easiness and high speed.
Sample Resist Pattern
Observation example by our laser microscope VL2000D (wavelength 408nm) Line width 3μm
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