Lasertec Corporation
OPTELICS® Special Page To have more profound knowledge about Confocal Microscope
Debut of an unprecedented Confocal Microscope OPTELICS® S130 equipped with 5 kinds of illumination wavelengths
1.Can freely choose a wavelength out of five kinds of wavelengths matching the nature of samples
For example, the red color wavelength (630nm) is used for observing patterns on the lower layer beneath various kinds of transparent layer such as glass or films. Observation of inclusions (bubbles and foreign particles) in a layer can use the green color wavelength (546nm) and observation of the outmost surface can use the purple color wavelength (405nm). By selecting the wavelength most suited to a sample out of 5 kinds of wavelengths in the region from violet to red, it becomes possible to obtain information that would not have been possible to observe thus far.
2.Bright, beautiful and high-resolution image that satisfies eyes of professionals
Realized high accuracy, high stability and high resolution of 0.13μm line and space. Higher accuracy than the conventional microscope has become possible in every direction of X,Y and Z.
3.High quality color image that vividly reproduces even texture of samples
High speed acquisition of color information data of RGB 3 frames with 1280x1024 resolution each. RGB 3 frames with 1.3 million pixels each are displayed as a full color image, which exhaustively reproduces texture of colored samples.
4.System configuration
Compatible with flexible measurements and system configuration with simple operability
5.Speedy nano-region measurement enabled by Mirau interferometric measurement system
Integration of an interferometric measurement system and a 5 wavelength confocal microscope enables nondestructive and noncontact measurement of samples in various fields.
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