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Analyzing system for surface feature and Raman solid state properties.

Raman VL2000D-RM
Now comes out Function of one step ahead based on integration of the most advanced technologies Analyzing system for surface feature and Raman solid state properties. Raman VL2000D-RM
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Applications

  • Metal:Surface roughness measurement, Void measurement, Analysis of mold, composite materials, metal corrosion. Measurement of photo luminescence, Composition evaluation of mineral
  • Carbon materials:Analysis of Carbon nano tube, DLC, Diamond, Graphite and such
  • Fine foreign particles:Analysis of organic and inorganic foreign particles
  • Multi layer structure :Analysis of laminated film
  • Ceramics :Analysis of Aluminum oxide and zirconia
  • Polymer materials:Analysis of polymer
  • Film characterization of various coating films
  • Semiconductor:Measurement of patterned line width, Counting of particles, Evaluation of residual stress in semiconductor
  • LCD:Measurement of pattern step, Measurement of spacer and color filter
  • Glass:Observation and shooting of surface, inside and fault

Features

  • By integrating a confocal blue laser scanning microscope and a microscopic Raman spectroscopy that had been separately operated as independent tools, it has become possible to easily match the microscopic location for observation with the microscopic location for analysis, which realizes analyses of higher reliability.
  • High resolution surface feature analysis of fine sample by a confocal blue laser scanning microscope and information on chemical composition by microscopic Raman spectroscope on the same microscopic location can now be obtained and this contributes to various R&D fields such as material science, inorganic chemistry and so on.
  • Microscopic Raman Spectroscopy is a tool excellent in identifying chemical idiosyncrasy that provides detailed information regarding molecular structure.
  • Possible to identify chemical composition
  • Possible to analyze physical structure
  • Possible to obtain crystal morphology and mechanical information
  • Blue laser scanning microscopy provides very beautiful high magnification/resolution image with deep focal depth that had not been obtained by conventional optical microscope.
  • Widely used as a surface analysis tool based on various measurement functions including 3D analysis
  • Possible to measure surface feature (3D display of material surface, profile measurement, surface roughness measurement)
  • Grain size distribution measurement is possible in addition to measurement of planar dimension, circularity, circumference length, maximum length and so on derived from contrast and unevenness information. The data can be made into texts and graphs.

Specifications

Microscopic Raman Spectroscopy
TypeZelnita type
Raman Scattering Throughput30% or more (under microscope, from objective to detector)
High performance notch filter for elimination of Rayleigh scattering2 pieces
Incoming radiation efficiency of activation laser into microscopy70% or more
Extended scanning measurement functionContinuous scanning over wide wave number range
Internal monochromatic meter specificationGrating :F1800g/mm
Wave number repeatability :F±014cm
Wave number resolution :F2cm-1
Wave number range for effective measurement:100cm-1~9000cm-1
High sensitivity CCD with peltiert cooling device1/2inchs 576~384pixels
Cooling temperature by peltiert device-70°C
Read out noise10e-/pixel or less
Dark current0.1e-/pixel or less
Quantum efficiency40% or more at650nm
Dynamic Range 16bits
Excitation light source: semiconductor laserLaser emission wavelength and output power : F488nm 20mW
Laser spot size range : F1~200μm
Outer dimension1500x1000x800mm(iincluding anti vibration desk)
Weight400kg (iincluding anti vibration desk)
Blue Laser Microscope
Light SourceBlue Laser Diode (Gallium Nitride; GaN)
Wavelength408nm
Scan speed1/15 sec
Resolution0.14μm
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