Laser confocal microscope
Violet Laser Microscope
VL2000DX
| High resolution laser confocal image of 4 million pixels |
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Applications
- Observation of various types of materials:
MEMS, NEMS, Semiconductor, Metals, Ceramics, Nanoimprint, Polymer Materials, Crystals, Biological Samples, Industrial Materials and so on
Features
- High-speed scan of a 408nm wavelength violet laser
- Confocal image of 4,000,000 pixels (2048x2048)
- Amazing pixel resolution of 0.03μm
- 10 hour recording/reproducing function of moving images
- Maximum image generation speed of 120 frames/sec by Variable Frame Rate (VFR)
- Automatic measurement function by one click (3D, surface roughness 2D, surface roughness 3D, profile measurement)
- Multi layer 3D, Shape measurement, Roughness measurement, Film thickness measurement
- Plentiful software functions such as patch work
Specifications
| Resolution | 0.14 μm |
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| Height measurement | Measurement repeatability(σ)0.02μm |
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| XY line width measurement | Measurement repeatability(3σ)0.02μm |