Products
Energy/Environment Related Products
Inspection of Transparent Wafer Related
Inspection of SiC wafer Related
PV Cell related
Semiconductor Inspection Systems
Wafer related
- TSV Back Grinding Process Measurement System WASAVI series BGM300
- TSV Etching Depth and Profile Measurement System WASAVI series TSV300S
- Lithography Process Inspection System WASAVI Series LX330
- MURA/Film Inspection System WASAVI Series MR300
- Patterned Wafer Warpage/Stress Inspection System WASAVI Series SK300
- Wafer Inspection/Review System Magics Series M5640
Mask related
- Mask Inspection System MATRICS X810 Series
- Photomask Inspection System MATRICS X700HiT Series
- Photomask Inspection System MATRICS X700 Series
- Photomask Inspection System MATRICS X600 Series
- Pellicle/Photomask Particle Inspection System PEGSIS P100
- EUV Mask Backside Inspection and Cleaning System BASIC Series
- Maskblanks Inspection System Magics Series M6640S/M6641S
- Maskblanks Inspection System Magics Series M6610
- EUVL Mask Substrates/Blanks Inspection System Magics Series M7360
- Phase Shift/Transmittance Measurement System MPM193EX
- Phase-Shift Measurement System MPM193
- Phase-Shift Measurement System MPM248
- ArF Mask Review Station MRS193EX
- DUV Mask Review Station MRS248
PCB mounting inspection
LCD Inspection and Repair System
Mask related
- Large Size Photomask Inspection System CLIOS G821
- Large Mask Inspection System LI Series LI712
- Pellicle Inspection and Pellicle Mounting System for LI712 71PA/71PP
- Pellicle Inspection and Pellicle Mounting System for 51MD 51PA
- Large Size Photomask Substrates/Blanks Inspection System LB79
- Middle/Large Photomask Inspection Systems LI Series LI34/LI44
