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Semiconductor Inspection Systems
Wafer related
SiC Wafer Inspection/Review System
MURA/CD Error High Resolution Visualizing System
Wafer Inspection / Review System
Patterned Wafer Warpage / Stress Inspection System
TSV Etching Depth Inspection System
Wafer Inspection/Review System
Mask related
Haze Removal System
Photomask Inspection System
Photomask Inspection System
Pellicle/Photomask Particle Inspection System
Maskblanks Inspection System
Maskblanks Inspection System
Mask Process Monitoring System
EUVL Mask Substrates / Blanks Inspection System
Mask Substrate Inspection System
Phase Shift/Transmittance Measurement System
Phase-Shift Measurement System
Phase-Shift Measurement System
APSM Etching Monitor
ArF Mask Review Station
DUV Mask Review Station
Mask Contamination Monitoring System
PCB mounting inspection
PC Parts Warpage/3D Profile Inspection System
LCD Inspection and Repair System‚“ / PV Cell Measurement System‚“
PV Cell related
Desktop Type PV Cell Conversion Efficiency Distribution Measurement System
PV Cell Conversion Efficiency Distribution Measurement System
Mask related
Large Size Photomask Substrates/Blanks Inspection System
Large Mask Inspection System
A Pellicle Inspection and Pellicle Mounting System for LI712
Large Size Photomask Inspection System
A pellicle inspection and pellicle mounting system for 51MD
LCD Large Photomask In-process Repair System
Middle/Large Photomask Inspection Systems
Color filter related
LCD/TFT•Color Filter Repair System
For Color Film Repair
CF/TFT repair system compatible up to 7th/8th generation LCD substrate
LCD Color Filter/TFT defect repair system
LCD Color Filter/TFT defect inspection system
Confocal Scanning Laser Microscopes
OPTELICS® series
Laser & Electron Scanning Microscope
3CCD Real Color Confocal Microscope
3CCD Real Color Confocal Microscope
Laser confocal microscope
Violet Laser Microscope
Products according to usage
Analyzing system for surface feature and Raman solid state properties.
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Production process of semiconductor and LCD TV
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