|
|
|
|
New Product
2001
- Apr 1, 2001
- Photomask / Reticle Inspection System "MD3000"
- Lasertec has developed the IC photomask/reticle inspection system "MD3000" with a light source of DUV-line, which is applicable to the next generation's IC design rules 130nm and 100nm, and offered it for sale since April 2001.
- Jan 15, 2001
- Confocal Scanning Microscope "HD100"
- Lasertec Corporation developed the second model of its confocal scanning microscope series "HD100" with a mercury lamp provided as a light source, and will put it on the market on January 15, 2001.
|
|
|
|
|
|