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New Product

2003

Nov 20, 2003
Real Color Confocal Microscope "OPTELICS® C130"
Lasertec has commercialized a new confocal microscope named "OPTELICS® C130" that provides real color observation and will start to accept orders on December 1st.

Lasertec counts on this new product as one of the flagship products from 2004 and onwards, and is planning to receive orders for about 60 units in the first year.
Nov 18, 2003
Wafer Inspection/Review System "M350H" Sales Release
Lasertec has commercialized a new wafer inspection/review system "M350H", a higher sensitivity version of the conventional "M350" known as "MAGICS", and will start to accept orders for this new product on December 1st. "M350H" is designed to be applicable to 90 nm design rule and onwards in semiconductor device field.

Lasertec counts on this new product as one of the flagship products from 2004 and onwards and is planning to receive orders for about 4 units in the first year.

* "MAGICS" is an abbreviation for Multiple image Acquisition for Giga-bit Inspection with Confocal System.
Nov 18, 2003
Mask Process Monitoring System "M2351" Sales Release
Lasertec has commercialized a new mask process monitoring system "M2351" that has pattern inspection capability based on the conventional mask blank inspection system "M3250" known as "MAGICS" and will start to accept order for this new product on December 1st. "M2351" is designed to be applicable to incoming inspection of Photomask blanks and to development of mask processes for the semiconductor devices with 90 nm design rule and onwards.

Lasertec counts on this new product as one of the flagship products from 2004 and onwards and is planning to receive orders for about 4 units in the first year.

* "MAGICS" is an abbreviation for Multiple image Acquisition for Giga-bit Inspection with Confocal System.
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