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New Product
2004
- Apr 13, 2004
- DUV Mask Review Station "MRS248"
- Lasertec has commercialized a new DUV Mask Review Station "MRS248" that has capability of observing mask patterns, foreign particles and defects of photomasks used for semiconductor device production and will start to accept order for this new product on April 13th.
- Apr 8, 2004
- Mask Contamination Monitoring System "MCM400"
- Lasertec has commercialized a new Mask Contamination Monitoring system "MCM400" that quantitatively measures chemical contamination of photomasks used for DUV lithography in semiconductor device manufacturing and will start to accept order for this new product on April 13th.
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