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New Product
2005
- Nov 25, 2005
- Pellicle/Photomask Particle Inspection System "PEGSIS P100"
- Lasertec has commercialized a new Pellicle*1/Photomask Particle Inspection System [PEGSIS *2 P100] that is compatible with photomasks for semiconductor devices with 90nm design rule and further. This new inspection system possesses the highest inspection speed in the industry with very high sensitivity. Lasertec will start to accept orders for this system on November 24th .
*1 Pellicle: A film that is placed to photomasks to protect particle contamination
*2 PEGSISFPellicle / Glass Surface Inspection System
- Sep 1, 2005
- Five Line Confocal Microscope "OPTELICS® S130"
- Lasertec has commercialized a new confocal microscope named "OPTELICS® S130" that utilizes 5 different wavelengths as light source and will start to accept orders on September 1st.
- Apr 1, 2005
- CF/TFT Repair System "CR Series" Compatible with 7/8th Generation LCD Mother Glass
- Lasertec has developed a multi functional color filter (CR)/TFT repair system [CR Series] that is compatible with the 8th generation LCD mother glass (about 2200mm x 2400mm).
- Mar 17, 2005
- Maskblanks Inspection System"M3320"
- Lasertec has commercialized a new maskblanks defect inspection system "M3320" for high sensitivity in-line defect inspection compatible with semiconductor devices of 90nm, and has started to accept order for this new product on March 17th.
"M3320" is a successor system to the conventional system "M1320" that is one of the Lasertec "MAGICS" series systems. "M3320" keeps the same level of high throughput as that of the conventional system and simultaneously achieves a remarkable improvement in defect inspection sensitivity.
* "MAGICS" is an abbreviation for Multiple image Acquisition for Giga-bit Inspection with Confocal System.
* Maskblanks is the substrate for photomask production before patterns are formed on the substrate.
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