Confocal Scanning Microscope "HD100"

Lasertec's newly developed confocal microscope "HD100" is a sister model of the high definition confocal microscope "1HD200", which received the "Kanagawa High Tech, Grand Prix" award in 1998.
Unlike the model "1HD200" that does scanning with high definition, the model "HD100" provides standard scanning, resulting in a lower cost. Nevertheless, the "HD100" employs the same optical system as the model "1HD200" within the camera head. Thus with these features, the model "HD100" becomes cost effective while realizing 3D characteristics with a much wider field (at a low magnification) than conventional microscopes.

• High 3D resolution with a wide field
  It has been said that an optical microscope finds difficulty in implementing a wide field and high 3D resolution at the same time. Conventional confocal microscopes face a problem that accuracy is decreased in a 3D measurement with a wide field. Solving this problem, Lasertec "HD100" achieves a high 3D resolution even at a low magnification.
• Excellent cost/performance tradeoff
  Since this model is designed especially for 3D measurement with a wide field, it has succeeded in realizing wider field images than ever while keeping the cost as low as possible. The model also retains the features of other conventional models to join the Lasertec microscope series

• Real-time observation and high-speed measurement with slit confocal optics
  Real-time observation is available because slit confocal optics does not depend on a scanning speed. Real-time images facilitate focusing and measurement operation, leading to a highly interactive man-machine interface. Further Lasertec confocal microscopes can precisely record any change of a sample even when the sample is always changing.
• Focus scanning memory function allowing for a deeper focal depth
  Lasertec employs the confocal optical system that provides a resolution in the direction of a sample depth (Z-axis). When a sample is scanned in the Z-axis direction, accumulation of focused images in the memory allows an image at a considerably deep focal depth to be obtained.
• Versatile measurement functions
  The confocal optical system provides images with a high contrast and high resolution. Then they can be used to make size measurement with accuracy. The optical measurement eliminates the need for evaporation or vacuum deposition on a sample so that it can provide high throughput. Further, non-contact surface profile measurement with high definition is available in the Z-axis direction using a special microscope base with a built-in precision actuator and hologram scale. Also Lasertec confocal microscopes feature real-time images, which always assures measurement with high measurement repeatability while minimizing effect of vibration.
• A wide variety of software
  The special image analysis software can provide various measurement and image processing including 3D display, particle distribution, surface profile measurement, statistical process, and layout. It also supports LAN application at factory or at laboratories.

Observation and 3D measurement for general industrial products, micro machines, shadow masks, liquid crystal masks, and new materials are possible.

Camera head, control unit, mercury lamp lighthouse, Z-axis control unit, 14-inch monitor, microscope base, and objective lens.

Vibration-isolating stage and image analysis software, etc.