Lasertec has developed a multi functional color filter (CR)/TFT repair system [CR Series] that is compatible with the 8th generation LCD mother glass (about 2200mm x 2400mm).
Background
As the growth in size of the LCD mother glass continuously presses forward, the production by the 7th generation mother glass starts in 2005 and the production by the 8th generation mother glass starts in 2006. In one way this growth in mother glass size presses forward and in another way the defect increase on CF/TFT glass substrate is becoming inevitable due to the introduction of new equipments and new processes. Furthermore, price deterioration of LCD panels forces all the LCD makers to pursue cost reduction and as a result the need for repair is intensifying for improving yields. In the aim to respond to such circumstances, we have developed a new repair system that is not only compatible with larger LCD mother glass, but also shows high processing speed and capability of high repair quality.
Description
In our CR series presented here, we have extensively improved the functions and performances by rejuvenating the platform of our conventional repair systems. Firs of all, we have newly developed a high performance X-Y stage and have achieved the highest speed in the industry. This new stage is made of steel pipes processed in the newest way, which solves the problem of stone stage procurement difficulty and as a result we have become more flexible in coping with size growth of the LCD mother glass and lead time for delivery. Furthermore, we have developed a new repair function that renovates the defective color filter pixels to almost perfect state, in addition to our conventional grinding tape repair function for Tokki defects and laser repair function for black defects. This new repair technology is developed by a joint effort of FUJI PHOTO FILM Company Ltd and Lasertec Corporation and is called "The Film Thermal Transfer Method". The FUJI PHOTO FILM's TRNSER film that is well established in the field of LCD color filter production is employed as the repair material to realize the complete dry process and high repair quality. This new method provides excellent process stability and controllability of repair in size and shape, along with superb film thickness uniformity, in comparison with the conventional ink coating repair method. In particular, this new method shows superiority in large size repair (about 300 µm square).
This new repair system is also equipped with the non-contact height measurement function that has been well received as ever and can satisfy broad range of needs regarding the repair of color filter and TFT substrates.
Features
- Compatible with the 8th generation LCD mother glass (2200mm x 2400mm)
- Have developed a color repair function by [the film thermal transfer method] and have installed this function that is capable to repair defects on color filters almost perfectly
- Have developed a high quality X-Y stage and established the highest speed in the industry (1500mm/sec)
- Have employed a stage made of steel pipes processed in the newest way, not employing stone stages that have become difficult to procure
- Minimized footprint in the same way as our conventional systems
- Applicable to wide range of processes from glass substrate to resist processes
- One system of this CR series will provide compatibility with many kinds of repair needs, because those very popular conventional functions such as the grinding tape function, laser repair function and non-contact height measurement function are also installed.
Applications
Repair of defects on FPD color filter and TFT arrays
Configuration
Main Body and Controlling PC/Control Box
