Lasertec has commercialized a new confocal microscope named "OPTELICS® S130" that utilizes 5 different wavelengths as light source and will start to accept orders on September 1st.
Background
In keeping pace with the market growth of mobile phones and peripheral equipments for information related systems, there is a growing needs to observe and measure simultaneously both the surface layers and under layers of multi-layered samples such as a liquid crystal display panels, films and polymer materials that are used in PC's, printers and so on. However, it has been difficult with the conventional single wavelength laser microscope to handle diversified types of samples. Thus, in the aim to bring solutions to this situation, we have developed a confocal microscope that widens the possibility of observation and measurement of more complicated samples by switching over wavelengths of the illuminating light.
Description
OPTELICS® S130 is a light scanning confocal microscope with an ability to choose 5 kinds of wavelengths that are 405nm, 436nm, 546nm 577nm and 630nm as the illuminating light by employing a high intensity Xe-Hg arc lamp that emits light of multiple spectrum lines. In addition to the top-class resolution as a confocal microscope, acquirable information such as a multi layer structure, color 3D and inner part observation on variety of samples has been dramatically widened by illuminating samples with the light optimal to each sample. Moreover, various measurement items such as height, shape and roughness measurement can be conducted with higher precision than those by the conventional confocal microscopes. Acquirement of color images is conducted by synthesizing three frame images of 1.3 million pixels for each R, G and B color and a very high resolution color image is realized, accordingly. Because the body of microscope itself is very lightweight and compact, carrying of the microscope is very easy. Another thing to be pointed out is that the microscope employs anti-vibration structure that quite effectively suppresses floor vibration, which does not restrict installation location.
Features
- 5 kinds of wavelengths, 405nm, 436nm, 546nm, 577nm and 630nm, are available. Various kinds of measurement are possible by selecting the light with the wavelength most suited to the sample.
- Resolution: 0.13µm, X,Y size measurement repeatability: 0.02µm(3s)
- Variety of software such as multi layer 3D, shape measurement, roughness measurement, thickness measurement and patchwork function is equipped.
- Realization of high resolution based on color image acquisition by 3 frames of 1.3 million pixels for each R, G and B color
- High resolution image output of 1280 x 1024 pixels (SXGA)
- Free to install at any place because of high resistance against floor vibration and easy to carry around because of light weight and compactness
- Electric objective lens revolver for magnification selection as a standard equipment
- Employment of an electric Z direction operation knob
Applications
Micro machine, semiconductors, LCD panels, metallic materials, chemical materials and other general observation/measurement
Standard configuration
Main body and controller
Computer
