Lasertec has commercialized a "3CCD Real Color Confocal Microscope [OPTELICS H1200]" that acquires high density real color confocal images based on high speed processing of 12,000,000 pixel signals obtained by 2048x2048x3CCD's (for RGB) mounted in the microscope.
Background
Enriched complex functions of information related terminals led by the sophistication of IT Society develops dramatic expansion of memory capacity, which demands higher level evaluation technologies for materials, processes and devices used in/for information terminals. Numerous kinds of materials such as metals, ceramics and polymers are processed to form devices, and consequently, demands for observation / measurement of material surface microstructure in each step of material processing in quick and detailed way is strong as ever. Confocal microscopes have long been used for observation / measurement of material surface shape and improvement of image quality, measurement accuracy and measurement time, and diversification of measurement wavelengths of confocal microscopes have been constantly pursued. Under such circumstances, Lasertec has commercialized a "3 CCD Real Color Confocal Microscope" that has measurement wavelength selectivity based on white light source, along with ability to acquire real color images with high speed by 3 CCD devices employed and highly automated observation / measurement function. This new product is designed to provide anybody with simple, quick and high accuracy measurements. This new product is also designed to work in various forms of application, from standalone operation for R&D purpose to operation as a built-in optical head in large-scale equipments.
Description
OPTELICS H1200 is developed in the aim that confocal microscopes play more important role in the field of materials and processes. In the first place, H1200 has the ability to acquire real color and high resolution confocal HD images as a result of employing a white light source and arranging 3 CCD's of large number of pixels for each color of R, G and B as light receiving devices. Mounting of 3 CCD's (RGB) provides not only high quality image but also detailed information of sample surface as delicate images on display monitors.
At the same time, image acquisition speed has been remarkably improved. Magnitude of frame size that realizes high resolution and scanning time for the frame size is in contradicting relationship. However, this contradiction was overcome by full use of optics, electronics and signal processing technology to realize acquisition of ultra high resolution image of 2048x2048x3CCDs'(RGB) with high speed of 7.5 frames per second. Furthermore, employment of Variable Frame Rate (VFR) provides selection of scanning speed as high as 120 frames/sec, which shortens the measurement time to one forth the measurement time of our conventional confocal microscopes. In addition, data transfer scheme is improved to be able to quickly transfer RGB image data of large volume so that simultaneous measurement data generation for each RGB wavelength can be conducted. Operational easiness has been improved to be able to automatically acquire basic data such as [3D], [Surface Roughness], [Profile] and such of a sample on the stage by simply clicking a newly prepared operation mode. Extensibility of the microscope is also considered so that simple addition of interference measurement function (option) provides vertical resolution of 0.1nm. Because Z detection mechanism is equipped on the revolver side, the microscope head built onto other inspection system can work as "an eye" for various type of automatic inspections. Compliance with CE marking and RoHS Directive will be completed within this year
Features
- Real Color Confocal Image of 12 million pixels by RGB 3 CCD's of 2048x2048 pixels each
- Highest scan speed of 120 frames/sec by Variable Frame Rate
- Vertical resolution of 0.1nm with addition of interference measurement function (Option)
- Selectivity of RGB measurement wavelengths (Simultaneous RGB measurement data acquisition by one scan)
- Automatic measurement function by one click (3D, Surface roughness 2D, Surface Roughness 3D and Profile measurement)
- Precise 3D measurement even for samples with large surface irregularity due to powerful measurement ability on inclined plane
- X, Y dimension measurement repeatability 0.02μ(3σ), Z measurement function 0.02μm (σ)
- Plentiful software functions such as Multi Layer 3D, Shape Measurement, Roughness Measurement, Patchwork and so on
- Electric revolver and Auto Focus as standard functions
- Compliance with CE marking and RoHS Directive within this year
Applications
- Observation of various types of materials:
MEMS, NEMS, Semiconductor, LCD Panel related materials, Metals, Ceramics, Chemical Materials, Polymer Materials, Crystals, Biological Samples, Industrial Materials and so on
Configuration
Main Body, Control Section, Lamp House, Computer Section
