Large Mask Inspection System LI712

Lasertec has commercialized an Automatic Defect Inspection System [LI712] that is utilized for LCD TFT production of G10 and beyond. LI712 is the successor of the Pattern defect inspection system [51MD series] that is a large size photmask inspection system, a de facto standard in the industry, for G8 LCD TFT production.

Photomask for LCD TFT is required to become larger and larger to satisfy demand for productivity improvement as the LCD panel application widens from monitor to TV. At the same time, patterns on Photomasks become finer and more complicated. Moreover, Photomasks need to be of higher quality as the usage of halftone masks and gray-tone masks become popular. For production of such photomasks, inspection system that can inspect such diversified photomasks with high-speed and high-sensitivity is becoming indispensable. Lasertec releases [LI712] with drastically improved performance from conventional systems, in order to satisfy these market needs.

• Inspection of masks up to maximum size of 1800 mm x 2000 mm x 22 mm (t)
  Capable of Die to Die and Double Eye Simultaneous Die to Database inspection modes
  # Implementation of Database inspection speed twice as high as that of the conventional system by installation of double Database
• Implementation of high-speed inspection 1.25 as high as that of the conventional system by employment of a new type TDI sensor and parallel image processing circuit
• Implementation of high resolution by employment of a new type TDI sensor and a newly designed high NA objective lens for g-line
• Employment of Database deployment engine compatible with halftone and sub-pixel
• Footprint conservation design by mask setting in vertical direction
• Pellicle mounting function inside the tool (Option)

• Inspection of Phtomasks for LCD TFT

Please review product page for any further information.