Lasertec has developed an integrated system [OPTELICS SH1200] comprised of Scanning Electron Microscope (SEM) and the newest 3CCD Real Color Confocal Microscope.
Description
The new microscopic system [OPTELICS SH1200] is a product aiming to satisfy the market needs that consists of necessity to seamlessly measure such samples as wafer patterns, electronic parts, nano-imprints, nano-Vickers and such, in the range from nano through micron.
The new system based on integration of Confocal Microscope and SEM technologies that have long been developed, provides means for observation and measurement that utilize strong points of both technological fields. The 3CCD Real Color Confocal Microscope is utilized as the Confocal Microscope, providing high-speed [3D observation and measurement].
The SEM component provides low vacuum observation and high vacuum observation along with X ray element analysis function (EDX) as an option. Installation of this EDX expands the application of SH1200 to element analysis based on energy dispersive method.
Key Features
- Seamless observation from nm to mm range
- SEM component provides low vacuum and high vacuum observations.
- X ray element analysis by EDX is also available (OPTION)
- 3D color image observation by the 3CCD Real Color Confocal Microscope
Applications
- Observation, measurement and analysis of MEMS, NEMS, Nano-Imprint, Semiconductors, LCD Related Materials, Metals, Ceramics, Chemical Substances, Polymer Materials, Crystals, Bio Samples, Industrial Materials and such.
