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2003

Nov 20, 2003

Real Color Confocal Microscope "OPTELICS® C130"

Lasertec has commercialized a new confocal microscope named "OPTELICS® C130" that provides real color observation and will start to accept orders on December 1st.

Lasertec counts on this new product as one of the flagship products from 2004 and onwards, and is planning to receive orders for about 60 units in the first year.

Description

The OPTELICS® C130 released here provides real color and high resolution image observation without any color blur because this microscope scans confocal images obtained by white light illumination using a Xe Lamp. In addition, the microscope possesses measurement capability for line width, height, shape, surface roughness and such, with a wavelength optimized for the sample out of a wide wavelength range. Image scan of 85 frames per second at the highest is realized and accordingly, a 3D structure measurement with higher speed than that by already existing Lasertec microscopes becomes possible. The main body of the microscope that is very compact and lightweight can be carried about. Also, the microscope is highly resistant to vibration and there is no restriction for a setting place.

Features

  • Confocal Image of real color without any color blur is realized.
  • Many kinds of measurements are possible by choosing a wavelength optimized for samples out of a wide wavelength range.
  • High speed image scan of 85 frames at the highest is possible. (Wire Frame Mode)
  • Possesses wide variety of measurement functions for such items as line width, height, shape, surface roughness and so on.
  • Images of deep focal depth utilizing confocal optics are available.
  • Resolution of color image output is as high as 1280 x 1024 (SXGA).
  • Highly resistant to vibration and no restriction for a setting place, accordingly. Lightweight and easy to carry about.
  • Observable sample height is as high as 90 mm.
  • Knob operation in Z direction is motorized.

Applications

Micro-machines, Semiconductors, Liquid Crystal related, Metals, Chemical materials, and general microscope use

Configuration

Main body and control unit
Computer unit

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