Wide Variety of Optional Functions (WIDE) Substantially Expand Performance of 3CCD Real Color Confocal Microscope [OPTELICS H1200]

Needs to measure samples such as wafer patterns, electronic devices, nano-imprint and nano-Vickers seamlessly from micron range to nano range is intensifying. Meanwhile, confocal microscopes are required to have ability to measure in extremely wide range with high accuracy. OPTELICS H1200 (WIDE) employs a high intensity Xe white light lamp, and integration of 3 CCD image sensors for RGB colors and confocal optics makes it possible to acquire high-resolution HD images. In addition to high picture quality with excellent color reproducibility due to employment of 3 CCD image sensors, high-level image processing technology presents expression of finest sample information on the screen. Moreover, ultra high-resolution images of 2048x2048x RGB pixels are acquired at the rate of 7.5 frames per second and also a high speed scan, maximum of 120 frames per second, is realized by variable frame rate (VFR) To the main body of this new microscope, the following functions can be selectively added. Such functions are Wavelength selection function (W), Mirau/Linnik interferometer (I), Differential Interference observation function (D) that observes nano-scale surface irregularity and Small size AFM integration (E). These optional functions make it possible to measure/observe in nano to milli range and the microscope becomes compatible with widely diversified samples.

[Features of WIDE, the new functions](Optional functions)

• Wave: Wavelength Selection Function
  Selection function of 5 wavelengths is a unique feature of Lasertec product. Information of each layer that has not been observable thus far for multi-layer samples can be obtained by appropriately selecting the measuring wavelength from blue wavelength up to red wavelength.
  5 wave lengths (blue: 436 nm, cyan: 488 nm, green: 546 nm, yellow: 577 nm, red: 630 mm)
• Interferometer: Mirau/Linnik Interferometer
  Based on Lasertec's long experience in application of interferometer, measurement by interferometer that has been very difficult thus far is made into an optional function that can be operated very easily by anybody. Measurement in nano scale is instantly available without conducting complicated calculation.
  Vertical resolution: 0.1 nm
  Maximum measurement area: 1800μm×1800μm
  Measurement time: 2 to 3 seconds
• DIC: Differential Interference Observation Function
  Fine surface irregularity of nano scale can be observed by differential interference. Polarizing microscopic observation is also available when Nomarski prism is taken off.
• Exceed: Atomic Force Microscope (AFM)
  Integration of a small size AFM to H1200 dramatically widens the measurement range "from micron scale to milli scale" thus far to "seamlessly from nano scale to milli scale".Scan Range: XY 20 μm, Z 2 μm or smaller

• High-resolution real color scanning confocal microscope with 3CCD image sensors
• Resolution: 0.15 μm / Height measurement repeatability (σ) 0.02 μm / X, Y dimension measurement repeatability (3σ) 0.01 μm
• Selection function of RGB measurement wavelength (Simultaneous acquisition of RGB measurement data by one scan)
• 12 million pixels by 2048 x 2048 x 3
• Variable Frame Rate: 11 steps for frame rate from 0.1 to 120 frames / sec
• One click function (3D, Surface roughness 2D, Surface roughness 3D, Profile measurement, image capture)
• Diversified software functions such as Multi layer 3D, Shape measurement, Roughness measurement, Thickness measurement and Patchwork
• Electric revolver as standard equipment

• Observation of various types of materials:
  MEMS, NEMS, Semiconductor, LCD Panel related materials, Metals, Ceramics, Chemical Materials, Polymer Materials, Crystals, Biological Samples, Industrial Materials and so on

Main Body, Control Section, Lamp House, Computer Section and option units

Please review product page for any further information.