Mask Blanks Inspection and Review System

MAGICS Series M8350/M8351

MAGICS Series M8350/M8351

Mask blank inspection system for 10 nm technology node and beyond.

Topics

Features

  • M8350/51 is one of the most advanced inspection systems featuring both high sensitivity suitable for next-generation mask blank inspection and high throughput necessary for outgoing and incoming inspection at production sites.
  • A new detection circuitry attuned to extremely small defects is incorporated in 31-beam scan confocal optics, one of the core technologies used on de facto standard of mask blank inspection systems, MAGICS.
  • Blank qualification capability is enhanced thanks to significantly higher sensitivity to defects not only on quartz substrates but also on state-of-the art mask blanks for MoSi binary masks and phase-shift masks.
  • The system accommodates multi-slot cassettes required by blank manufacturers and RSP, MRP and EUVL dual pod cassettes used at mask shops.
  • M8351 meets the requirement of line & space monitor pattern inspection, offering a useful tool for managing various processes at mask shops.

Applications

  • Inspection of quartz substrates, Cr layers, MoSi layers, half tone layers, EUV mask blanks (multilayer and absorber) and resist-coated blanks
  • Defect reviews

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