Phase-Shift Measurement System

MPM248

MPM248

A de facto standard phase-shift measurement system for KrF wavelength

Features

  • Phase-shift measurement system for KrF (248nm), which is now the de facto standard in the industry
  • Directly measures phase-shift with the same wavelength as the exposure wavelength of steppers
  • Can measure transmittance of Att-PSM's (Half-tone type phase-shift masks).
  • Realized high stability against floor vibration, and air turbulence within the system.

Applications

  • Phase-Shift Measurement of phase-shift masks
  • Transmittance measurement of Att-PSM's (Half-tone type phase-shift masks)

Specifications

Substrate Size 6025
Measurement Wavelength 248nm
Measurement Repeatability Phase-shift measurement:0.5°(3σ)
Transmittance measurement:0.2% (3σ)

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