Wafer inspection/measurement

Wafer Edge Inspection System
EZ300

Wafer Bump Inspection and Measurement system
BIM300

TSV Back Grinding Process Measurement System
BGM300

Lithography Process Inspection System
LX530

Lithography Process Inspection System
LX330

MURA/Film Inspection System
MR300

Wafer Inspection/Review System
MAGICS Series M5640

Mask inspection/measurement

Mask Inspection System
MATRICS X810EX Series

Mask Inspection System
MATRICS X810 Series

Photomask Inspection System
MATRICS X700HiT Series

Photomask Inspection System
MATRICS X700 Series

Pellicle/Photomask Particle Inspection System
PEGSIS P100

EUV Mask Backside Inspection and Cleaning System
BASIC Series

M8350/M8351
Maskblanks Inspection System MAGICS Series M8350/M8351

Maskblanks Inspection Systems
MAGICS Series M6640S/M6641S

Maskblanks Inspection System
MAGICS Series M6610

Phase Shift/Transmittance Measurement System
MPM193EX

Phase-Shift Measurement System
MPM248

DUV Mask Review Station
MRS248