Product
Phase Shift / Transmittance Measurement System MPM193EX and ArF Mask Review Station MRS 193EX
2008.02.19
Lasertec Corporation today simultaneously announces two new products [Phase Shift / Transmittance Measurement System MPM193EX] and [ArF Mask Review Station MRS193EX]
Phase Shift / Transmittance Measurement System MPM193EX
Features
- Measurement performance is remarkably improved.
- Measurement of masks with pellicle mounted is possible.
- Automatic inspection function is greatly improved compared with that of the conventional model
- Phase shift measurement in the micro area of 1 µm or less is now possible.
- Auto loader and mini-environment with chemical filters are standard equipments.
- The system is built up on a unified platform with MRS193EX and mask review function can be added as option, accordingly.
Applications
- Phase shift measurement of phase shift masks
- Transmittance measurement of half tone phase shift mask
- Defect review of masks (Option)
Configuration
Main Body, Control Section, Computer Section
ArF Mask Review Station MRS 193EX
Features
- Mask Defect Review System most suited for defect observation after defect inspection in Photomask production
- Implementation of higher resolution by employment of shorter wavelength reinforces review ability of mask patterns and defects smaller than 100 nm.
- Masks with pellicle mounted can be observed.
- Employment of high precision stage makes defect observation easy based on the coordinate data from defect inspection systems.
- Defect area in the viewing field is automatically detected and provides highlight display of defects.
- The system is built up on a unified platform with MPM193EX and phase shift / transmittance measurement function can be added as an option, accordingly.
- 3D measurement becomes available by installing an AFM within the system. (Option)
- Defect transfer simulation software can be linked to the system. (Option)
Applications
- Mask defect review after defect inspection
- Defect size measurement
- Verification of foreign particles (cleanable) and pattern defects (repair needed)
- Phase shift / Transmittance measurements (Option)
Configuration
Main Body, Control Section, Computer Section