Product

Phase Shift / Transmittance Measurement System MPM193EX and ArF Mask Review Station MRS 193EX

2008.02.19

Lasertec Corporation today simultaneously announces two new products [Phase Shift / Transmittance Measurement System MPM193EX] and [ArF Mask Review Station MRS193EX]

Phase Shift / Transmittance Measurement System MPM193EX

Features

  • Measurement performance is remarkably improved.
  • Measurement of masks with pellicle mounted is possible.
  • Automatic inspection function is greatly improved compared with that of the conventional model
  • Phase shift measurement in the micro area of 1 µm or less is now possible.
  • Auto loader and mini-environment with chemical filters are standard equipments.
  • The system is built up on a unified platform with MRS193EX and mask review function can be added as option, accordingly.

Applications

  • Phase shift measurement of phase shift masks
  • Transmittance measurement of half tone phase shift mask
  • Defect review of masks (Option)

Configuration

Main Body, Control Section, Computer Section

ArF Mask Review Station MRS 193EX

Features

  • Mask Defect Review System most suited for defect observation after defect inspection in Photomask production
  • Implementation of higher resolution by employment of shorter wavelength reinforces review ability of mask patterns and defects smaller than 100 nm.
  • Masks with pellicle mounted can be observed.
  • Employment of high precision stage makes defect observation easy based on the coordinate data from defect inspection systems.
  • Defect area in the viewing field is automatically detected and provides highlight display of defects.
  • The system is built up on a unified platform with MPM193EX and phase shift / transmittance measurement function can be added as an option, accordingly.
  • 3D measurement becomes available by installing an AFM within the system. (Option)
  • Defect transfer simulation software can be linked to the system. (Option)

Applications

  • Mask defect review after defect inspection
  • Defect size measurement
  • Verification of foreign particles (cleanable) and pattern defects (repair needed)
  • Phase shift / Transmittance measurements (Option)

Configuration

Main Body, Control Section, Computer Section

Confocal System Solution Department
Monday through Friday, 9:00 to 17:00