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Semiconductor-related

  • Mask-related systems (EUV)
  • Mask-related systems (DUV)
  • Wafer-related systems

Mask-related systems (EUV)

ACTIS A150
Actinic EUV Patterned Mask Inspection System
ACTIS A150
ABICS E120
EUV Mask Blanks Inspection and Review System
ABICS E120
NEW
MATRICS X9ULTRA Series
Mask Inspection System
MATRICS X9ULTRA Series
MATRICS X8ULTRA Series
Mask Inspection System
MATRICS X8ULTRA Series
MAGICS Series M9650/M9651
Mask Blanks Inspection and Review System
MAGICS Series M9650/M9651
BASIC Series
EUV Mask Backside Inspection and Cleaning System
BASIC Series
MZ100
Mask Edge Inspection System
MZ100

Mask-related systems (DUV)

MATRICS X810EX Series
Mask Inspection System
MATRICS X810EX Series
MATRICS X800LITE Series
Mask Inspection System
MATRICS X800LITE Series
MAGICS Series M8650/M8651
Mask Blanks Inspection and Review System
MAGICS Series M8650/M8651
MAGICS Series M8350/M8351
Mask Blanks Inspection and Review System
MAGICS Series M8350/M8351
MAGICS Series M6750/M6751
Mask Blanks Inspection and Review System
MAGICS Series M6750/M6751
MAGICS Series M6640S/M6641S
Mask Blanks Inspection and Review System
MAGICS Series M6640S/M6641S
MPM193EX
Phase-Shift and Transmittance Measurement System
MPM193EX
MPM248
Phase-Shift Measurement System
MPM248

Wafer-related systems

SICA88
SiC Wafer Inspection and Review System
SICA88
GALOIS211
GaN Wafer Inspection and Review System
GALOIS211
LX Series
Multi-Wavelength Wafer Inspection System
LX Series
EZ300
Wafer Edge Inspection System
EZ300
BGM300
TSV Back Grinding Process Measurement System
BGM300
BIM300
Wafer Bump Inspection and Measurement System
BIM300
MAGICS Series M5640
Wafer Inspection and Review System
MAGICS Series M5640
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Semiconductor-related
FPD-related
Microscopes
Related information
Glossary

A collection of technical words often used with Lasertec products and technologies

Exhibitions

Schedule of events where Lasertec will exibit products

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