Wafer inspection/measurement

Wafer Edge Inspection System
EZ300

Wafer Bump Inspection and Measurement system
BIM300

TSV Back Grinding Process Measurement System
BGM300

Lithography Process Inspection System
LX530

Lithography Process Inspection System
LX330

Wafer Inspection and Review System
MAGICS Series M5640

Mask inspection/measurement

Mask Inspection System
MATRICS X8ULTRA Series

Mask Inspection System
MATRICS X810EX Series

Mask Inspection System
MATRICS X810 Series

Photomask Inspection System
MATRICS X700HiT Series

Photomask Inspection System
MATRICS X700 Series

EUV Mask Blanks Inspection and Review System
ABICS E120

EUV Mask Backside Inspection and Cleaning System
BASIC Series

Mask Blanks Inspection and Review System
MAGICS Series M8650/M8651

Mask Blanks Inspection and Review System
MAGICS Series M8350/M8351

Mask Blanks Inspection and Review System
MAGICS Series M6640S/M6641S

Phase-Shift and Transmittance Measurement System
MPM193EX

Phase-Shift Measurement System
MPM248