Phase-Shift and Transmittance Measurement System
MPM193 Series
Phase-shift measurement system for ArF
Topics
Features
- Phase-shift measurement system for ArF (193nm), the de facto industry standard
- Direct measurement of phase-shift at the same wavelength as the exposure wavelength of steppers
- Supports transmittance measurement of half-tone phase-shift masks (Att-PSMs)
- High stability against floor vibration and internal air turbulence
Applications
- Phase-shift measurement of phase-shift masks (PSMs)
- Transmittance measurement of half-tone (attenuated) PSMs
Specifications
MPM193Ⅱ（Lamp-based light source）
| Measurement Repeatability | Phase-shift measurement:0.5°(3σ) |
|---|---|
| Transmittance measurement:0.2% (3σ) |
MPM193EX（Laser light source）
| Measurement Repeatability | Phase measurement repeatability: 0.2° (3σ) |
|---|---|
| Transmittance measurement repeatability: 0.04% (3σ) |
