FPD Photomask Inspection System
CLIOS G10 Series
For high speed, high sensitivity inspection of Generation 10.5 FPD photomasks
Topics
Features
- Inspection and defect review of photomasks up to Generation 10.5 (2000mm x 1800mm)
- Sophisticated defect detection algorithm and high-resolution database for high-sensitivity inspection
- Simultaneous execution of die-to-die and die-to-database inspection (Combination mode)
- 30% shorter inspection time (compared with the conventional model) by introducing a newly designed stage and a high-speed defect detection processing unit
- Fully-automated processing by SECS/GEM
Applications
- Inspection of Generation 10.5 photomasks during manufacturing and for pre-shipping quality assurance
Specifications
| Applicable mask size | 800mm (W) x 520mm (H) to 2,000mm (W) x 1,800mm (H) |
|---|---|
| Sensitivity | 0.4µm ※Sensitivity check masks will be used for sensitivity assurance. |
| Inspection time | 8 hours (1,760mm x 1,600mm) |
| Mask type | Half tone mask, gray tone mask, binary mask |
| Dimensions | 5,600mm (W) x 2,000mm (D) x 3,100mm (H) |
| Weight | Approximately 10,000kg |
