EUV Pellicle Inspection System
PELMIS Series
NEW
Detection and high accuracy classification of particles on EUV pellicles
Topics
Features
- Inspection of pellicles and automatic classification of whether particles are on the front or back side of pelliclized EUV masks
- Detection of particles on the surface of pellicles as well as the pattern surface and the peripheral area of masks
- Die-to-die inspection and mask-to-mask inspection
Applications
- Detection of particles on EUV pellicles and the pattern surface of masks and periodic quality assurance inspection at wafer fabs
- Quality assurance inspection during EUV mask manufacturing processes at mask shops
