Actinic EUV Patterned Mask Inspection System
ACTIS A200HiT Series
NEW
High-throughput ACTIS model for wafer fabs that detects printable defects on EUV masks at high speed with high sensitivity
Topics
Features
- Triple inspection speed of ACTIS A150
- Detection of printable defects during EUV mask operations at wafer fabs
Applications
- Incoming EUV mask inspection at wafer fabs
- Periodic quality assurance inspection of EUV mask at wafer fabs
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