Mask Blanks Inspection and Review System
MAGICS Series M6640S/M6641S
Mask blank inspection system that achieve both high sensitivity and high throughput simultaneously
Topics
Features
- MAGICS series model featuring high sensitivity required for inspection of mask blanks as well as high throughput suitable for outgoing and incoming inspection of mask blanks in production.
- Multi-beam scanning method using 63 beams based on confocal optics, the core technology of the industry-standard MAGICS series inspection system.
- Special inspection circuitry attuned to detection of smallest defects.
- Inspection of pinhole defects on MoSi or Cr film with a dramatically higher sensitivity compared to the conventional system, enabling the selection of higher quality mask blanks.
- M6641S has an added capability to perform inspections in Dense Scan Mode (higher sensitivity mode) and Line & Space pattern inspections, thereby making an effective tool for various process management at mask shops.
- Applicable to a variety of cassettes including multiple-slot cassettes (for blanks manufacturers), RSP, and MRP (both for mask shops).
Applications
- Inspection of quartz substrates, Cr films, MoSi films, half-toned films, and resist-coated mask blanks
- Review of defects on these advanced mask blanks
Specifications
| Wavelength of Inspection light source used for inspection | 532nm |
|---|---|
| Inspection sensitivity | φ50 nm (PSL on quartz substrate, normal mode) |
| Inspection time | 12 minutes per plate (normal mode, Inspection area of 142 mm x 142 mm) |
| Applicable substrate | 6025 |
