High Sensitivity Under-layer Defect Inspection and Review System
CIRIUS Series
A high-sensitivity under-layer defect inspection and review system that addresses the needs arising from the progress of three-dimensional IC chip manufacturing
Topics
Features
- Proprietary optics enabling high sensitivity under-layer defect inspection
- Review optics capturing depth information for accurate defect classification
- High-throughput inspection
Applications
- High sensitivity under-layer defect inspection for 3D NAND and other highly layered IC devices
- High sensitivity under-layer defect inspection for bonded wafers
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