FPD Photomask Inspection System



  • Single-eye, single-magnification Die-to-Database inspection system adopting i-line optics (using the shortest wavelength of light among Lasertec FPD mask inspection systems)
  • New TDI and newly developed AF achieving a maximum detection sensitivity of 0.6µm
  • Inspecting whole G8 mask in about 3 hours despite single eye system
  • Auto defect image recording function enabling offline review
  • Dedicated to Die to Database inspection and delivering high sensitivity whole mask inspection for any pattern layout


  • Inspection during middle-end FPD mask production and pre-shipping quality assurance inspection


Applicable mask size 800mm (W) x 520mm (H) ~ 1,550mm (W) x 1,300mm (H)
Maximum detection sensitivity 0.6µm (to be assured with Lasertec standard mask)
Scan speed 125mm per second
Outer dimensions 5,000mm (W) x 1,815mm (D) x 3,000mm (H)
Weight Approx. 8,400kg (not including rack)

Product Search