Automatic Inspection and Review System
OPTELICS AI²
Automatic defect inspection, high-magnification review, and 3D surface shape profiling all in a single device.
Topics
Features
- Automatic defect inspection, high-magnification review, and surface shape profiling of various types of semiconductor wafers, all in a single device that serves the varying needs of customers in their R&D and production processes
- High-speed inspection capability: inspecting a whole 3-inch wafer in 15 minutes with sub-micron sensitivity
- High-magnification review capability: high-magnification surface shape profiling available with switching of objective lens
- Deep learning-based high-precision image classification, patterned sample inspection, and inspection of specific types of defects
- Defect inspection, high-magnification review, and surface shape profiling of transparent samples, such as compound semiconductors and films, without interference of backside reflection
- Lasertec providing a complete system including both hardware and software, making customization for specific need, and offering entire system support
Applications
- High-speed automatic defect inspection of various types of semiconductor wafers
- Defect review
- Defect surface shape profiling
- Defect tracking in production process
Specifications
| Inspection time (3" wafer) | 15 minutes per wafer |
|---|---|
| Samples | Various types of semiconductor wafers (including, silicon, SiC, GaN, InP, AIN and glass), glass substrates, films, and others |
| High-speed automatic surface defect inspection | Confocal and differential interference contrast optics |
| High-magnification defect review | Confocal optics |
| Defect shape 3D profiling |
