Lasertec has launched OPTELICS AI², a new type of confocal microscope designed to perform automatic defect inspection and review. AI² provides high-speed automatic surface defect inspection, defect mapping, and high-magnification defect shape review from a single platform.

There has been a rapid increase in the demand for semiconductor devices due to the growing need for power semiconductor devices, 5G mobile communication, high-performance computing, and other applications. Semiconductor device manufacturers are expected to keep developing new devices with increased performance. For the commercialization of devices that utlilze new designs and materials, there are numerous challenges that need to be addressed through cross-organizaional efforts, including the evaluation of prototypes, quality control during production, and process improvement for higher yields.

AI² performs automatic surface defect inspection, defect review, and defect shape 3D profiling on a single platform, serving customer need in various situations of R&D and production.

AI² achieves both high-throughput, high-speed inspection and high-magnification surface shape profiling by integrating Lasertec's core technology in confocal optics, automatic inspection software perfected through the development of various semiconductor-related inspection systems, and newly designed high-speed motion hardware into a system. AI² conducts AI-based inspection using deep learning and offers advanced inspection functions such as high-precision image classification, patterned sample inspection, and the extraction of specific types of defects.

Lasertec is dedicated to addressing customer need and helping customers succeed in various R&D and yield improvement efforts.